| Description | Certified value (nm) | RM name | RM type | RM no. |
|---|---|---|---|---|
| AFM gold spheres | 50 | AFM gold spheres | RM | 15 |
| Step chip material: Silicon | 50 | HS-05 | RM | 64 |
| Depth-setting standard | 250 | KNT 2060/01 | RM | 19 |
| Superfine roughness standard | 20 | KNT 2070/03 | RM | 21 |
| Depth-setting standard | 240 | KNT 2080/03 | RM | 20 |
| To calibrate the height of an AFM instrument or estimate the instrument´s step height | 0,31 | Standard sample for height | RM | 58 |
| Grooves etched in silicon | 50 | Step height standard | RM | 14 |
| Step height standards | 50 | step height standards | RM | 18 |
| Step height standards | 8 | step height standards | RM | 17 |
| Step height standards | 50 | step height standards | RM | 16 |
|
Surface Topography Standards (STS):
Gratings with near perfect periodicity combination of step height and pitch |
18, 44, 100, 180 | NanoLattice (TM) (NLSM) 100 nm pitch standard | RM | 38 |
|
Surface Topography References (STR):
Combination of step height and pitch to enable three-dimensional calibration of optical interferometric microscopes and AFMs |
18, 44, 100, 180 | Surface Topography References (STR) | RM | 39 |