| Description | Certified value (nm) |
RM name | RM type | RM no. |
|---|---|---|---|---|
|
1 D grating pitch standard:
Still R&D? From INMS, NRC/IMS Line width rougness and cross sectional characterization of sub-50 nm structures using CD-SAXS and CD-SEM |
150 | 1 D grating pitch standard | RM | 24 |
|
AFM probe characterizer:
Line width (+ knife edge); still R&D ? not yet on NIMS homepage |
13 | AFM probe characterizer | RM | 23 |
| Etched silicon lines; still R&D? | 50 | etched silicon lines | RM | 25 |
| Grating for vertical calibration | 20 | grating for vertical calibration | RM | 22 |
|
Etched nanoscaled cross section:
Line width from 3 nm to 1000 nm, calibration of lateral resolution, under development |
4 | under development | RM | 26 |
| AFM gold spheres | 50, 100, 230 | AFM gold spheres | RM | 15 |
| Superfine roughness standard | 20, 100 | KNT 2070/03 | RM | 21 |