| Description | Certified value (nm) | RM name | RM type | RM no. |
|---|---|---|---|---|
|
Lateral-(xy)-calibration standard
2-dim lattice of inverted square pyramids, 100nm pitch, etched into a silicon chip; pitch (Edge length of square pyramids approx. 50 nm) |
100 | 2D100 | RM | 30 |
|
Grating for vertical calibration
18 nm - 26 nm |
18 | TGZ01 | RM | 27 |
| Grating for vertical calibration | 94 | TGZ02 | RM | 28 |
|
HOPG terminated with graphene layer
Ideal atomically flat surface: standard for SPM investigations |
atomically flat surface | RM | 29 |