| Description | Certified value (nm) | RM name | RM type | RM no. |
|---|---|---|---|---|
|
Nanoscale stripe pattern for testing of lateral resolution
3.5, 14.2, 19.5, 38, 96, ..., 691, 986, 4642 nm and calibration of length scale |
3,5 | BAM L200 nanoscale stripe pattern |
CRM | 31 |
| Cross section of C-W multilayer | 10 | cross section of C-Wo multilayer |
RM | 63 |
|
Line width standard
80, 100, 115, 130, ... |
80 | Line width standard | RM | 33 |
|
Standard microscale
Calibration of length expansion scale on SEM |
240 | Standard Microsale | CRM | 57 |
|
Surface Topography Standards (STS)
Gratings with near perfect periodicity combination of step height and pitch |
18, 44, 100, 180 | NanoLattice (TM) (NLSM) 100 nm pitch standard |
RM | 38 |
|
Surface Topography References (STR)
Combination of step height and pitch to enable three-dimensional calibration of optical interferometric microscopes and AFMs. |
18, 44, 100, 180 | Surface Topography References (STR) | RM | 39 |
| One-dimensional pitch standard | 80 | KRISS207-01-1D1 | CRM | 76 |