| Description | Certified value (nm) | RM name | RM type | RM no. |
|---|---|---|---|---|
|
Lateral-(xy)-calibration standard
2-dim lattice of inverted square pyramids, 200 nm pitch, etched into a silicon chip |
100 | 2D100, 2D200 | RM | 34 |
|
Nanoscale AFM-CD standard
line width; 50, 100, 150, ... |
50, 100, 150 | Nanoscale AFM-CD standard | RM | 35 |
|
NanoCD standards (NCD)
25, 45, 70, 110 |
25, 45, 70, 110 | NanoCD standards (NCD) | RM | 36 |
| NanoLattice pitch standard (NLSM) | 100, 200 | NanoLattice pitch standard (NLSM) | RM | 37 |
|
Standard micro scale
It consists of two direction rulers |
100 | HJ-2000,2100 | CRM | 75 |