| Description | Certified value (nm) | RM name | RM type | RM no. |
|---|---|---|---|---|
|
NanoCD Standards (NCD)
25, 45, 70, 110 |
25 | NanoCD Standards (NCD) | RM | 36 |
|
Surface Topography Standards (STS)
Gratings with near perfect periodicity combination of step height and pitch |
18 | NanoLattice (TM) (NLSM) 100 nm | RM | 38 |
|
NanoLattice Pitch Standard (NLSM)
Lateral distance |
100 | NanoLattice Pitch Standard | RM | 37 |
|
Nanoscale AFM-CD Standard
Line width; 50, 100, 150, ... |
50 | Nanoscale AFM-CD Standard | RM | 35 |
|
Surface Topography References (STR)
Combination of step height and pitch to enable three-dimensional calibration of optical interferometric microscopes and AFMs |
18 | Surface Topography References | RM | 39 |