| Description | Certified value (nm) | RM name | RM type | RM no. |
|---|---|---|---|---|
|
GaAs/AlAs super lattice
The CRM has six-layer-structure and the certified values for the thickness from the second to sixth layer are given; control the precision of analysis and to regulate measurement condition in depth profile analysis by ion sputtering |
9,51 | NMIJ CRM 5203-a | CRM | 55 |
|
Ultrathin silicon dioxide film
3.49 nm (0.19 nm); control the precision of analysis and to regulate measurement condition in depth profile analysis by ion sputtering |
3,49 | NMIJ CRM 5204-a | CRM | 56 |
|
Standard sample for in-depth profiling
Mo/Si multilayer |
20 | Standard sample for in-depth | CRM | 62 |
|
GaAs/AlAs-Superlattice calibration of depth resolution |
23 | CRM 5201-a | CRM | 32 |